【摘要】 采用射频等离子体增强化学气相沉积(RF-PECVD)技术制备非晶硅顶电池,采用甚高频等离子体增强化学气相沉积(VHF-PECVD)技术制备微晶硅底电池,初步优化研究了薄膜非晶硅/微晶硅叠层太阳电池顶电池与底电池的本征吸收层厚度匹配与电池电流匹配,以及氧化锌/金属复合背反射电极对电池的作用。研制出了面积为1.0 cm2效率达9.83%的薄膜非晶硅/微晶硅叠层太阳电池。更多还原

【Abstract】 a-Si/μC-Si tandem solar cells were prepared with RF-PECVD for top cells and VHF-PECVD for bottom cells.The thickness and current match for sub-cells were optimized.The effect of ZnO/Ag back reflector was also investigated.The a-Si/μC-Si tandem solar cells with efficiency was around 9.83%.更多还原