【摘要】 本文采用HPAgilent4294A阻抗分析仪、SEM、XRD、TEM等测试方法研究了不同Sr/Ba比对Sr(1-x)BaxTiO3(SBT)薄膜结构与性能的影响。在同一测试频率下,当Sr/Ba比为0.5时,薄膜的相对介电常数εr最大,介质损耗tanδ相对较小,最大εr温度点Tm为305K;在所测试的频率范围内,εr随频率的升高而降低,tanδ则相反,表现出较好的频散特性。薄膜的矿物相为四方钙钛矿结构。Sr/Ba比为0.5时,薄膜表面无裂纹,孔洞少,颗粒集聚较少,其平均粒径均为80nm,分布均匀;晶格条纹间距约为2.96A,晶界两侧的晶粒取向是随机的。更多还原

【Abstract】 The influences of ratios of Sr and Ba on the dielectric properties and microstructure of Sr1-xBaxTiO3 thin films were studied by means of impedance analyzer HPAgilent 4294A, SEM, XRD, and TEM. Maximum dielectric constant εr, minimum dielectric loss tanδ appeared as ratio of Sr and Ba was 0.5 at the same test frequency. The temperature Tm for maximum εr (Cure temperature) was higher with the amount of Ba increased. Better scattering frequency characteristics appeared for thin films in the scope of test frequency. Uniform distribution of tetragonal perovskit grains, no gas pocket and crack, lower stacking of crystal grains presented on the surface of thin film with the ratio of Sr and Ba by 0.5. The average grain diameter was about 80 nm, spacing of lattice fringes was 0.296A, orientation of crystal grains connecting to crystal boundary was disordered.更多还原