【摘要】 聚酰亚胺 /SiO2 合成薄膜是一种具有优良力热光电性能的薄膜材料,在MEMS工艺中具有广阔的应用前景,其力学性能测量的研究具有非常重要的意义。本文将数字散斑相关技术和微拉伸试验相结合,对厚度为 37μm的聚酰亚胺(polyimide) /二氧化硅(SiO2 )合成薄膜进行了力学性能测量,获得了比较满意的结果。文章给出了测得的弹性模量和泊松比。为了解决数字散斑相关法不能直接测量较大变形的缺陷,本文提出了多级相关算法,并利用亚像素搜索和双线性插值进行了数据处理。更多还原

【Abstract】 The polyimide/SiO\-2 film is a kind of film material which has extremely properties of mechanics, heat, light and electricity and therefore has very wide application in the micro-electro-mechanical system (MEMS) material technology. It has special important point to measure the mechanical properties of the polyimide /SiO\-2 film. The digital speckle correlation technique and the micro-draw experiment were combined in this paper. The methods of the sub-pixels search and bilinear interpolation were used in the digital image processing. As the digital speckle correlation method (DSCM) cannot be directly used in measuring a large deformation, an improved multilevel DSCM was proposed. The mechanical properties of the polyimide /SiO\-2 film with 37μm thickness was measured in the experiments. The results of the experiments are satisfied. The Young’s modulus and the Possion’s ratio are presented.更多还原