【摘要】 介绍一种基于玻璃基底微流控芯片的制作方法,通过光刻工艺在玻璃基底表面刻蚀出微通道。利用氧等离子体对聚二甲基硅氧烷(Polydimethylsiloxane,PDMS)和微通道所在的基底表面进行处理,使PDMS与基底表面性质由疏水性变为亲水性,完成PDMS与玻璃基底的共价键结合。通过实验表明,经氧等离子体处理之后的PDMS与玻璃基底的密封效果较好。鉴于PDMS具有良好的热稳定性,无毒性,以及较好的光学特性等,此微流控芯片可用于生物医学以及化学领域中的化学发光及荧光检测。更多还原

【Abstract】 A fabrication procedure about microfluidic channels on soda-lime glass is described.The microchannels fabrication procedures is based on the semiconductor fabrication technology and etch the microfluidic channels using lithography.The PDMS and glass substrate can form the covalent bonding after oxygen plasma process.The SEM pictures and tests show the PDMS seals the microchannels well and tightly.Because of the optics and calorifics,this microfluidic chips can be used to detect the luminescence and fluorescence.更多还原