【摘要】 用非平衡磁控溅射离子镀法沉积了钛含量不同的MoS2-Ti复合薄膜,电子探针分析表明共沉积钛可以降低MoS2薄膜中氧杂质的含量,XRD分析显示薄膜具有类似非晶的结构.划痕试验结果显示薄膜的临界载荷都大于100 N,球盘磨损试验结果显示MoS-Ti复合薄膜比MoS薄膜耐磨性好,并且摩擦系数低于0.07.更多还原

【Abstract】 MoS₂-Ti composite films with different titanium concentrations are deposited by unbalanced magnetron sputter ion plating.Electron probe microanalysis（EPMA） shows that the oxygen content of the MoS₂ films can be decreased by co-depositing titanium.XRD indicates that the films are quasi-amorphous structure.The scratch tests show that the films undergo no failure up to a load of 100 N.The pin-on-disc tests indicate that the MoS₂-Ti composite films are more wear resistant than MoS₂ film and retain low friction coefficients（under 0.07）.更多还原