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分层蒸镀制备聚酰亚胺自支撑膜及其特性研究

Preparation of ultra-thin freestanding polyimide films with sequential evaporation technique

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【Author】 QI Tong-fei,WU Yong-gang,WANG Yong,ZHANG Li,LIN Xiao-yan,TIAN Guo-xun,JIAO Hong-fei,CHEN Ling-yan(Pohl Institute of Solid State Physics,Institute of Precise Optical Engineering and Technology,Tongji University,Shanghai 200092,China)

【机构】同济大学波耳固体物理研究所精密光学工程技术研究所；同济大学波耳固体物理研究所精密光学工程技术研究所上海200092；上海200092；上海200092；

【摘要】采用分层蒸镀法,在玻璃基片上依次蒸镀二氨基二苯醚(ODA)和均苯四甲酸二酐(PMDA)两种单体,然后在空气环境中对样品进行不同温度和时间的热亚胺化处理,使二者在交界面上反应生成聚酰亚胺。经加热150℃1 h然后经350℃2 h处理的样品,在脱膜后能制备出直径1.8 cm,厚度为100 nm的聚酰亚胺自支撑薄膜。用FTIR测量了自支撑薄膜的红外光谱,特征吸收峰的分析表明薄膜已基本上完全亚胺化。用原子力显微镜分析了浮法玻璃衬底上聚酰亚胺薄膜的表面形貌,结果表明以ODA作为内层制备的膜层表面更光滑平整。更多还原

【Abstract】 Ultra-thin freestanding polyimide(PI) films of 100 nm thickness were formed by sequential evaporation of 4,4’-diaminodiphenyl ether(ODA) and pyromellitic dianhydride(PMDA) precursor monomers followed by a thermal treatment of 150 ℃ 1 h and 350 ℃ 2 h.The chemical structures of the PI films were investigated using FTIR spectroscopy and the degree of imidization was calculated.Results show that the PI film has a fully imidization.The surface morphology of the films,compared with co-deposited PI films,was observed using AFM,the surface morphology of the PI films would be better by depositing ODA first.更多还原

【关键词】分层蒸镀；单体；聚酰亚胺；自支撑膜；表面形貌；
【Key words】 Sequential deposition； Monomer； Polyimide； Freestanding film； Surface morphology；

【基金】国家863计划项目资助课题;国家自然科学基金资助课题(10576021)

【文献出处】强激光与粒子束 ,High Power Laser & Particle Beams , 编辑部邮箱 ,2005年10期

【分类号】TB43;
【被引频次】4
【下载频次】146

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