【摘要】 提出一种新型压电驱动精密位移机构 ,着重介绍了其结构、工作原理和控制方法 ,分析了机构参数与输出性能之间的关系。该机构以压电叠堆为动力元件驱动流体 ,利用换向阀控制流体流向 ,通过执行缸两个腔体内流体置换的方法将压电叠堆的往复振动转换成执行缸的直线运动。调整电压或执行缸的参数可获得所需的进给步长和输出推力 ,具有精度高、易于控制、稳定性好等特点 ,适用于微位移以及较大行程范围内的精密进给运动。更多还原

【Abstract】 A new type of accurate-motion mechanism with hydro-piezoelectric drive was provided in this paper. It introduced the structure, principle and control method,and analyzed the relationship between the structure parameters and the output ability. In this mechanism,piezoelectric stack used as the power element to drive the liquid, the reversal valve controls the way of the flow and alter the piezoelectric stack’s vibration to linear movement with the volume change between the two cavity of the hydraulic cylinder. We can adjust the voltage or the structure of the mechanism to attain some step-length and the output force with the characteristics of high accuracy, easy control and high stability. It can be used in micro-motion and accurate-motion with long journey(depends on the length of the actuating cylinder).更多还原