【摘要】 与传统的压电传感器相比,电容式微加工超声传感器(cMUT)性能优良,有着广泛的应用前景.为此,介绍了cMUT的基本结构和工作原理,并提出了一种新型结构.利用有限元分析软件ANSYS对这种结构进行模态分析,得到其共振频率和一阶振动图;利用ANSYS的耦合场分析模块和参数化设计语言(APDL),对结构进行力电耦合仿真,获得其直流偏压和作为发射器时所需的交流电压值.分析结果表明,所设计的结构符合设计要求.更多还原

【Abstract】 Capacitive microfabricated ultrasonic transducer (cMUT) has superior performance to the traditional piezoelectric transducers and will be used in a wide variety of applications. In this paper the basic structure and operating principle of cMUT are reported, and a new kind of structure is presented. Then the new structure is simulated with modal analysis by finite element analysis software ANSYS, and the resonant frequency and the first vibration map are presented. Using coupling field of ANSYS and parameter design language (APDL), the structure is simulated with force electric coupling. The biased DC voltage and the AC excitation required by a transmitter are obtained. The results indicate the structure designed meets the design (principle. )更多还原