节点文献
薄膜成核过程的分子动力学模拟
Molecular dynamics simulation in nucleus process of coating
【摘要】 用分子动力学的方法,在计算机上模拟了在具有不同偏斜度Sk的衬底上薄膜的成核过程,从理论上证明了偏斜度Sk取值在-1~-3时,薄膜的成核率高,从而有利于薄膜的生长。
【Abstract】 The Nucleus circumstance of the coating on the substrate with different skewness of the profile (Sk) has been simulated by molecular dynamics method. It is proved that when the Sk is from -1 to -3, the Nucleus of thin films is higher.
【关键词】 偏斜度;
分子动力学;
成核过程;
计算机模拟;
【Key words】 skewness of the profile (Sk); molecular dynamics; Nucleus computer simulation;
【Key words】 skewness of the profile (Sk); molecular dynamics; Nucleus computer simulation;
- 【文献出处】 机械 ,Machinery , 编辑部邮箱 ,2005年S1期
- 【分类号】TB43
- 【被引频次】2
- 【下载频次】259