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单粒子束精确定位照射装置在CR-39膜上刻蚀中国地图边界研究

Single Particles Irradiating Scattergrams of China Map Profile Etched on CR-39 Film

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【作者】 张俊王旭飞胡智文陈连运王晓华李军吴瑜陈斌胡素华许明亮吴李君余增亮

【Author】 ZHANG Jun~(1)) WANG Xu-Fei HU Zhi-Wen CHEN Lian-Yun WANG Xiao-Hua LI Jun WU Yu CHEN Bin HU Su-Hua XU Ming-Liang WU Li-Jun YU Zeng-Liang~(2)) (Key Laboratory of Ion Beam Bioengineering, Institute of Plasma Physics, CAS, Hefei 230031, China)

【机构】 中国科学院等离子体物理研究所离子束生物工程学重点实验室中国科学院等离子体物理研究所离子束生物工程学重点实验室 合肥230031合肥230031合肥230031

【摘要】 采用自编写的图像处理程序把中国地图处理成为边界点阵图,并根据点阵图每点的坐标位置,利用中国第1台单粒子束精确定位照射装置提供的单质子束在CR-39膜上几百μm×几百μm的范围内辐照并刻蚀出中国地图边界.研究表明,该单粒子束精确定位照射装置计数准确(98%),定位精确(平均误差小于3μm),辐照路径算法选择合理(近邻法),预测值和实测值吻合程度高,可以满足刻蚀CR-39膜微图像和生物细胞辐照实验的要求.

【Abstract】 High resolution scattergrams of China map profile are etched on the CR-39 film within a small area of hundreds of microns×hundreds of microns by the AS-LIBB single proton microbeam, according to the coordinates of the standard images, which are acquired by the home-developed image-processing program. The testing results show that the single particle detection efficiency for this facility is over 98%, and the target-positioning accuracy is within 3μm. Moreover, the near-path traversing algorithm for stage control is optimal for irradiating scattergrams of picture profile, and the dots on CR-39 film for the measured results and the expected values are quite identical. Therefore, this single particle irradiation system meets to the demands of etching micron-(dimensional) pictures on CR-39 film in dot manner with single particles and the needs of the biological cell irradiation experiments.

【关键词】 单粒子CR39膜近邻法中国地图微细加工
【Key words】 single particleCR-39near path methodmap of Chinamicro-etch
【基金】 “十五”国家重点攻关项目(2001BA302B);中国科学院重大设备研制项目(19875054)资助~~
  • 【文献出处】 高能物理与核物理 ,High Energy Physics and Nuclear Physics , 编辑部邮箱 ,2005年07期
  • 【分类号】P28
  • 【被引频次】2
  • 【下载频次】77
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