【摘要】 建立了大面积热丝化学气相沉积衬底温度控制系统的数学模型,提出了一种基于自回归模糊神经网络控制策略,并进行了计算机仿真和试验研究。结果表明,系统具有较强的自适应、自学习能力,对设定轨迹具有良好的跟踪性能,可很好地满足金刚石膜沉积过程中系统的控制性能要求。更多还原

【Abstract】 A mathematical model is built up for the substrate temperature of the large-aera hot filament chemical vapor deposition system. A recurrent fuzzy-neural network strategy for the substrate temperature control system is presented. Then computer simulation and test study on the system are performed. The results show that the controller has strong abilities of self-adapting and self-study, can successfully track the set curve of the substrate temperature and meet well the need of the temperature control during depositing diamond films.更多还原