【摘要】 针对缺乏半导体生产线动态调度分布协同机制的研究现状,提出了基于扩展的任务分析环境建模与仿真／通用部分全局规划一合同网(ETAEMS／GPGP-CN)的动态调度技术。对TAEMS的非局部影响进行扩展,以实现调度过程中协同关系的定量描述与分析。利用GPGP获取上、下游协同信息,结合合同网的招投标机制,以解决其动态调度。以某150 mm晶圆生产线为例,仿真试验表明了该动态调度算法的有效性。更多还原

【Abstract】 There is a lack of distributed coordination mechanism for semiconductor fabrication line dynamic scheduling status in quo. To resolve this problem, a novel modeling and scheduling technology, ETAEMS/GPGP-CN, for dynamic scheduling of semiconductor fabrication line is proposed. To extend the non-local effect of TAEMS, ETAEMS can be used to quantitatively model and analyze the coordination relationship. Integrating the GPGP for upstream or downstream coordination information and contract net, GPGP-CN algorithm for dynamic scheduling is given. An illustrative example of a 150 mm semiconductor fabrication line in shanghai demonstrates the effectiveness of approach.更多还原