【摘要】 介绍了超精密加工中主轴电机的振动及其对超精密加工的影响;在原有伺服电机的基础上设计并制作了气浮电机;用加速度传感器提取电机的振动信号,并用AD3525FFT频谱分析仪对电机的振动加速度信号进行了分析,测试出在电机转速为500r/min时普通伺服主轴电机和气浮主轴电机的振动和速度分别为0.436×10-4g和0.108×10-4g,用改造的气浮主轴伺服电机构成的超精密加工系统,加工KDP晶体的表面粗糙度达到了8nm。本项研究对提高超精密加工主轴系统精度具有一定的实用价值。更多还原

【Abstract】 Introduce the motor’s vibration and the vibration’s influence upon the accuracy of the ultra precision process.Based on the original servo motor,design and make an air-bearing motor.Extracted the motor’s vibration signals by using acceleration sensors,and analyze the acceleration signals by using AD3525 FFT analyzer,the result showed that when the motor speed is 500r/min,the vibration acceleration is 0436×10-4g when use the normal servo motor,the vibration acceleration is 0.108×10-4g when use the air-bearing motor.Machiniang KDP crystals by using the ultra precision processing system with air-bearing motor,the rouqnness of the kdp crystals can be less than 8nm. This research shows practical value to improve the accuracy of the ultra precision processing systsem.更多还原