【摘要】 依据低温等离子体转化有害气体的机理,设计了一种基于介质阻挡放电原理的低温等离子体发生器.通过试验研究对比,分析了微放电过程及等离子体空间分布特性,研究介质材料、厚度、放电间隙、电源电压及频率对放电特性的影响.研究表明:选择相对介电常数较大、较薄的介质更易获得较大的放电强度;较小的放电间隙有利于提高放电的强度和放电的均匀性.增大电源电压和频率会使放电功率随之增大.更多还原

【Abstract】 The theory of dielectric barrier discharge is introduced. The process and the characteristics of micro discharge are analyzed. The factors of dielectric barrier discharge are studied by the experiments. The result shows that the intensity of discharge rises with the increase of dielectric constant and drops with the increase of barrier thickness. Reducing the air gap will promote the steadiness and intensity of the discharge,and increasing the voltage and frequency of power supply will make the discharge much more intense.更多还原