【摘要】 Er2O3是一种很有希望的高κ材料。在氧气氛下热蒸发金属铒源,制备了Er2O3的薄膜,随后在氧气氛下对它进行了退火。通过对其C-V及I-V特性的测试,认为该材料的电学特性优秀,应该进行进一步的研究。更多还原

【Abstract】 Erbia（Er₂O₃） is a hopeful high-κ material.We have realized thin Er₂O₃ film’s growth on Si（100） by evaporating metallic Er source in oxygen ambience. Then we annealed it in oxygen ambience.From the results of C-V and I-V test,we can see the film’s electrical properties are good.So we think this kind of material should be studied further.更多还原