【摘要】 轮廓的尺寸量、位置量以及形状误差估计值的不确定度与测量误差、被测轮廓的形状特征以及采样策略等有关。当采样点数较少且对轮廓形状特征和仪器特性缺少先验认识时,分析轮廓参数估计值的不确定度是困难的。文中依据轮廓形状特征模型,首次提出“二次测量法”理论,用来辨识模型参数,并定量分析轮廓参数估计值的不确定度。仿真和实测结果表明,该方法是有效的。更多还原

【Abstract】 Sampling strategy, measurement errors and measured contour form features are all related to the uncertainty analysis for dimension, position and form error estimated. When the characteristics of measurement error, contour form features, etc., can not be gotten advanced and the number of sampled points is fewer, it is difficult to analysis the uncertainty of estimated geometric parameters. A method called “bi-measurement evaluation method” is discussed, by which the parameters of the model for measured contour are identified, and the uncertainties of geometric parameters estimated are quantified. The method has been proved by simulation as well as by measuring a real contour.更多还原