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液晶微棱镜阵列工艺结构研究
Study of liquid crystsal microprism arrays manufacturing process
【摘要】 本文对液晶微棱镜阵列的设计与工艺的基本问题进行了讨论。针对TFT的优势,试制了激光晶化底栅结构的poly-SiTFT为构造核心的液晶微棱镜,对其工艺结构和液晶的光学性能进行了探讨。实验表明,尽管TFT液晶微棱镜工艺复杂,但具有一定的优点值得深入研究。
【Abstract】 this paper discussed manufacturing liquid crystal microlens arrays.The advantage of poly-silicon thin film transistor(TFT)is taken to construct liquid crystal microlens arrays in which the poly-silicon is induced to crystallized by molecular laser.The photonic properties and process of liquid crystal microlens arrays were discribed.The experiment illustrated that it is worth of deep study though the process of TFT liquid crystal microlens is complicated.
【关键词】 液晶;
微棱镜;
阵列;
光通信;
器件;
【Key words】 liquid crystal; microlens array; light communication; device;
【Key words】 liquid crystal; microlens array; light communication; device;
【基金】 国防预研基金2000J2.4.3JW150;湖北省重大项目(2000Z04007);武汉市重点攻关项目。
- 【文献出处】 激光杂志 ,Laser Journal , 编辑部邮箱 ,2005年04期
- 【分类号】TN248.1
- 【被引频次】1
- 【下载频次】150