【摘要】 用一种聚合物材料薄膜作为掩膜 ,通过在电化学腐蚀过程中控制腐蚀电流和时间 ,首次制备出了氧化多孔硅波导定向耦合器。实验中用波长为 980nm的激光作为信号光源 ,观测到了样品的耦合光信号。给出了耦合器耦合系数不确定的因素 ,同时也分析了多孔硅波导传输损耗形成的原因。更多还原

【Abstract】 The polymer film is used as the pattern mask;the oxidized porous silicon directional coupler is fabricatnd firstly by controling the current density and time during electrochemical anodisation process.The coupling signal is observed from the outputting end face of one waveguide channel of coupler as the 980nm laser is injected into another waveguide channel by end-fire coupling.Uncertain factor that influences the coupling coefficient of this coupler is analysed,the origin of propagation loss of this porous silicon waveguide is determined also.更多还原