【摘要】 介绍了大行程纳米定位载物工作台中宏动系统的组成,研究了如何在传统的滚珠丝杠传动及直线滚珠导轨导向方式下,通过光栅测量装置检测并反馈控制系统,以及相应补偿等,使宏动载物工作台完成微定位要求的定位精度和分辨率的宏定位。更多还原

【Abstract】 The paper introduces the composition of the macro moving system of long distance nano-positioning stage. It researches how to test and feed back to the control system and give some correspondence compensation with grating measurement device by means of conventional ball-screw driving and roller linear guidance. In addition, the macro positioning of the positioning precision and resolution is researched which need to be satisfied for the macro moving stage to realize the micro positioning.更多还原