【摘要】 阐述了激光干涉测量技术是高精度位移测量的最主要方法之一,具有测量范围大、分辨率高和测量精度高等优点。然而,随着测量距离增大,各项误差也随之增大。其中,余弦误差就在大行程激光干涉测量过程中成为一项不可忽略的误差。分析了余弦误差产生的原因,并设计了一套余弦误差修正系统来消除其误差。更多还原

【Abstract】 Laser interference measurement technology has been one of the most important methods used in high - precision measurenment, possessing the virtues of large measurement - scope, high resolution and high accuracy. However,as measurement - scope became large, so each measurement error will be large. Therein, cosine error can not be ignored in a wide - range laser interference measurement because it may also influence the measurement accuracy. This paper analyses the cause of bringing forth cosine error, and designs a cosine error calibration system in order to eliminate it.更多还原