【摘要】 在已有的研究成果基础之上,介绍了一种以柱面全息光栅为标准器的大量程表面形貌测量仪,详细说明了该仪器传感器原理和光电信号处理方法,开发了基于虚拟仪器平台LabW indows/CVI的软件系统并进行了实际测量。该仪器垂直测量范围为±3mm,垂直分辨率为0.005μm。更多还原

【Abstract】 On the basis of existing techniques,a surface topography measurement instrument with large measuring range was introduced,which adopts cylindrical hologram diffraction grating as standard.The principle of sensor and method of photoelectric signal processing was described.The software system based on virtual instrument development platform LabWindows/CVI was developed.The parameters of typical components were measured and the characterization results were given.The measuring range of the instrument is ±3mm,and the vertical resolution is 0.005 μm.更多还原