【摘要】 对裂纹垂直于薄膜与基底交界面,且尖端达到了交界面的情形进行分析。基于Beuth理论,把模型简化为平面应变问题,并通过有限元分析程序评价了具有裂纹的薄膜—基底结构的断裂机理,得到了薄膜与基底的不同弹性错配及不同厚度比率对薄膜裂纹的应力强度因子的影响。结果表明:对于β=0和β=α/4的条件下,应力强度因子的幅值随着α值(-1<α<+1)的增大而减小,其误差小于5%。更多还原

【Abstract】 This study is aimed at the problem of a crack in the film oriented perpendicular to the film-substrate interface with the tip touching the interface.Based on Beuth’s theory are efforts to simplify three-dimensional model to plane strain problems and evaluate fracture mechanisms of a cracked film-substrate configuration by designing universal program of finite element method,and the stress intensity factor is affected by the different elastic mismatches and the thickness ratio of the film and the substrate.These results show:The stress intensity factor will decrease with the increase of α(-1<α<+1)for β=0 and β=α/4,and α and β are Dundurs parameters;The result shows that error of SIF in this paper is less than 5%.更多还原