【摘要】 分析了微机电系统中静电-结构耦合的拉入(pull-in)特性,比较了牛顿迭代法、松弛法、有限元/边界元混合法等方法求解静电-结构耦合问题的各自特点。更多还原

【Abstract】 Coupled electro-mechanical behavior is an important characteristic of electrostatic microelectromechanical system(MEMS) actuators.Comparisons of Newton iteration algorithm,relaxation method and combination of finite element method and boundary element method are described in solving the electro-structure coupled domain.更多还原