【摘要】 利用同步辐射光电子能谱全电子产额模式 (TEY)对石墨、金刚石薄膜和类金刚石薄膜 (DLC)的 C1s X射线吸收谱进行了研究。在高真空里表面净化处理后,在类金刚石薄膜的 C1s 吸收谱中分别观察到对应于金刚石 sp3杂化结构成分和石墨 sp2杂化结构成分的特征峰,说明了类金刚石薄膜是由碳 sp2、sp3两种杂化结构无序混合形成的非晶碳结构;然后,测量了一系列类金刚石薄膜样品的 C1s X 射线光电子能谱 (XPS),得到了每组样品的 sp2/sp3成分比。更多还原

【Abstract】 We have investigated the C1s X-ray absorption spectra of graphite, diamond and diamond-like car- bon ( DLC ) film using total electron yield mode of the surface sensitive photoelectron spectroscopy. After cleaning the surface in an ultra high vacuum system, we found the feature peaks of the sp3 and sp2 hybridized bonding on the C1s X-ray absorption spectra of DLC, which means that DLC is an amorphous carbon of sp2 mixed with sp3 bonding. And we have measured the C1s photoelectron spectra of a series of DLC films, and calculated the ratios of sp2/sp3.更多还原