【摘要】 采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜,可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。纳米多孔硅膜具有优异的耐热性和化学稳定性,且可回收利用。在医学上的纳米多孔硅膜可作为药物载体、免疫隔离生物胶囊、纳米硅微镜和纳米多孔硅生物传感器。更多还原

【Abstract】 Fabricating the nanoporous sil icon membrane with nanotechnology and Bio-MEMS technology,the thickness of memb rane,pore size and distribution , geometry shape and porosity can precisely con trolled.The nanoporous silicon membrane is thermally, chemically, mechanically stable and retrievable and can be reused.The nanoporous silicon membrane can be used as drug carrier,immuniosolating biocapsules,nanoporous silicon micromirr or and biosensors in medical field .更多还原