【摘要】 综述了钛酸锶钡(BST)铁电薄膜的4种制备工艺:磁控溅射(Magnetron sputtering)法、金属有机物化学气相沉积(MOCVD)法、脉冲激光淀积(PLD)法,以及溶胶—凝胶(Sol—Gel)法。并介绍了BST铁电薄膜在动态随机存储器、非致冷红外探测器热成像、移相器等方面的应用及其研究进展。更多还原

【Abstract】 Magnetron sputtering,MOCVD(Metal Organic Chemical Vapor Deposition),PLD(Pulsed Laser Deposition) and Sol—Gel,the preparation technologies for ferroelectric thin film of barium strontium titanate(BST) are introduced.And the development and research of BST ferroeleetric thin film,and its applications on DRAM,uncooled infrared detector of thermalimager and phase shifter,are reviewed.更多还原