【摘要】 介绍一种等离子教学实验装置的构造、原理及其诊断方法,其主体为 T 型真空室,由两个圆柱形主辅真空室构成,它可获得直流辉光等离子体；射频电容耦合放电、无电极放电等多种等离子体,利用静电探针可以对直流等离子体的基本参数如电子温度、电子密度进行测量诊断,可对不同等离子体的相互作用进行演示、研究．更多还原

【Abstract】 This paper introduced a plasma teaching experimental device.Its main frame is made up of a “T” shape vacuum discharge chamber.It can gain the direct current glow plasma.The plasma a parameter,such as elec- non temperature and electron density,can be diagnosed by the static electricity probe.It can be use to re- search different plasmas.更多还原