【摘要】 应用传统的陶瓷制备工艺制备Ba0.7Sr0.3TiO3陶瓷靶材,讨论了Ba0.7Sr0.3TiO3陶瓷靶材的最佳工艺条件.用XRD衍射仪分析了预烧粉料的物相结构,并结合热失重(TG)分析确定了BST(70/30)粉料的预烧温度,用SEM观察了Ba0.7Sr0.3TiO3陶瓷靶材在不同烧结温度下的显微结构,用Agilent 4294A精密阻抗分析仪测得BST靶材的介电性能,用Prec ise-W orkshop测试BST靶材的铁电性能.实验结果表明,采用传统的陶瓷制备工艺制得晶粒较为均匀、结构致密的Ba0.7Sr0.3TiO3陶瓷靶材的最佳工艺条件为:在940℃预烧2 h,1 300℃烧结2 h.更多还原

【Abstract】 The Ba_0.7Sr_0.3TiO₃ ceramic target was prepared by conventional ceramic processing and the most optimum processing of the Ba_0.7Sr_0.3TiO₃ ceramic target for radio frequency magnetron sputtering was discussed.The phase structure of the calcined BST powder was studied by XRD.The calcined temperature of the BST（70/30） powder was decided by the analyse of XRD and TG.The microstructure of the Ba_0.7Sr_0.3TiO₃ ceramic target which was sintered at different temperatures was observed by SEM.The dielectric properties was measured by Agilent4294A impedance analyzer.The ferroelectric properties was measured by Precise Workshop.The results show that the most ideal processing to prepare Ba_0.7Sr_0.3TiO₃ ceramic target are calcined at 940 ℃ for 2 hours,and sintered at 1 300 ℃for 2 hours.更多还原