【摘要】 介绍了电容式高分子湿敏元件的几个组成部分—下电极、湿敏功能材料、上电极工艺制造技术。同时也介绍了湿敏元件防污染、电路一体化设计、长期稳定性等方面近来的研究成果。指出湿敏元件的感湿材料的选择和上电极工艺制造技术是影响湿敏元件性能的两个重要因素。更多还原

【Abstract】 Several components of capacitive polymer humidity sensor-below electrodes,functional humidity-sensitive material,technology of making top electrodes are introduced. At the some time the pollution pretection of humidity sensor,incorporate circuit design and the long-term stability are also introduced. Two important factors which are influenced performance of humidity sensor,are also pointed out, they are the choice of humidity-sensitive material and the technology of making top electrodes.更多还原