【摘要】 提出了一种采用光热激励和光拾取的全光谐振技术方法,确定硅微机械薄膜的杨氏弹性模量.该方法基于光热激励的致动机理,使用调制光对硅微机械薄膜结构进行光热激励使之谐振,利用光纤传感技术拾取其谐振频率信号,进而利用谐振理论模型确定其杨氏弹性模量.为准确确定杨氏弹性模量,利用了硅微薄膜结构的前三阶谐振频率进行多次测量,求均值的方法.为简化光激励测试系统,设计了新颖结构的单光源激励测试系统,同时实现了对微机械薄膜结构的激振和信号拾取.更多还原

【Abstract】 Owing to Micro-mechanical silicon membrane structures micro size and fragile properties, the method to determine Young′s moduli must be non-contact and nondestructive. Based on the photo-thermal effect, a novel method was presented by using optically excited resonance and optical fiber sensing techniques in this paper. This new method utilizes first three resonant modes of the fabricated silicon membranes to get a more accurate evaluation of Young′s moduli, and a novel optical exciting and sensing system using only one optical resource was set up to make the evaluation more practical.更多还原