【摘要】 对泄漏波导法测量薄膜折射率和厚度的实验方法做了介绍,基于四层介质结构的理论模型,通过严格的电磁场理论推导出了测量方法依据的本征色散方程,并使用了Newton Raphson方法求解复传播常数,保证了测量的精确与快捷 以等离子增强化学气相沉积法生长的SiO2 薄膜为例,对其折射率和厚度进行了测定 实验证明,本文方法与传统方法相比,不仅具有更高的测量精度,而且数据处理更加快捷,完成一片样品测试,仅花费机时60ms更多还原

【Abstract】 An accurate method for measuring the refractive index and thickness of a dielectric film in a leakage waveguide is presented in details. The dispersion equation of a four-layers structure is derived. The complex propagation constant is determined with the Newton-Raphson numerical method. With the dispersion equation derived above , the method for measuring the optical parameters of the single-layer is presented. As an example, the refractive index and thickness of the single-layer silica film deposited with Plasma Enhanced Chemical Vapor Deposition are determined by the present method. The result shows that the present method is accurate and fast compared with the traditional method .To determine the parameters of a sample, a personal computer only spends 60ms using the present method.更多还原