【摘要】 ECR等离子源主要由电源系统、抽气系统、供气系统、真空室等设备组成,对于研究型设备,还包括测控部分。传统的测控系统对系统设备大多采用单台测控,人工调节,这样系统效率比较低。该文采用模拟开关切换8路静电探针得到不同位置的等离子体参数,经电荷放大器对弱信号进行放大后显示。该方法在实际使用中取得了较好的效果。更多还原

【Abstract】 ECR plasma source consists of electrical soure,deflation system,air feed system,electron tube etc.For study purpose,It also includes a measurement & control system.The conventional measurement & control system are used to take single control to the system equipment,which is adjustable manually.It makes the system inefficient.This paper proposes a method of automatic measurement & control for the system,using analog switches to transfer several analog signals with a charge amplifier to magnify weak signals.This method is very effective in practice.更多还原