【摘要】 微变形反射镜(MEMS-DM)是用于自适应光学中波前校正的重要元件。测试实验中对37单元微变形反射镜的光学影响函数矩阵进行了推导和全面测量,从而验证了其叠加性。由光学影响函数推导出了微变形反射镜的控制电压矩阵,利用电压矩阵校正了变形镜的初始面形。最后,对微变形镜校正波前畸变能力进行了测量和评估,得出关于优化微变形镜设计相关方面的一些结论。更多还原

【Abstract】 <Abstrcat>Mems deformable mirror is a very important element in adaptive optical system. The optics influence function matrix of 37-segment mems deformable mirror is deduced from the test and the iterative capability is provided. Based on the matrix, the original surface of deformable mirror is corrected. Finally, deformable mirror’s corrective capability is tested and evaluated. Some conclusion about optimizing is got from the test.更多还原