【摘要】 针对材料在纳米压痕硬度测试实验中出现的压痕尺寸效应,通过对单晶硅的纳米压痕实验,得到压痕的真实最大压深,再利用原子力显微镜获得压痕的三维形貌,并结合Matlab软件得到压痕的真实残余面积。以残余面积和最大压深为变量,提出了一种新的描述硬度压痕尺寸效应的模型———残余面积最大压深模型,此模型能更好地描述和理解纳米压痕硬度的尺寸效应。更多还原

【Abstract】 In order to research the indentation size effect (ISE) in the material nanoindentation hardness test, a single silicon crystal was used in nanoindentation experiments to get maximum depths. Combining Matlab software and the 3 dimensional morphology of nanoindentation obtained by an atomic force microscopy (AFM), the real residual areas were obtained. Based on the maximum depth and the residual area, a new model——residual area maximum depth model is proposed for indentation size effect on nanoindentaion hardness. The model can understand and describe ISE in nanoindentation hardness better than other models.更多还原