【摘要】 在常规的条状一维位置敏感探测器(PSD)中,光敏区和位置电阻区是结合在一起的,器件的欧姆接触电极难以做得比较理想,因此器件的位置准确度和线性度也受到了不利的影响。而在梳状一维位置敏感探测器中,光敏区和位置电阻区被分成了梳齿区和梳脊区两部分,并且位置电阻区被设计成很窄的长条,即使掺杂浓度比较高,位置电阻也能做得相当大。这样条状一维位置敏感探测器接触电极上的缺陷就可消除。用两种不同的一维位置敏感探测器所测量的位置特性曲线证实了理论分析的正确性。测量结果还表明,梳状一维位置敏感探测器的位置准确度和线性度比条状一维位置敏感探测器有了显著的提高,梳状一维位置敏感探测器的平均位置误差从条状一维位置敏感探测器的55μm减小到了26μm,梳状一维位置敏感探测器的均方根非线性度从条状一维位置敏感探测器的0.94%减小到了0.09%。更多还原

【Abstract】 In a conventional,strip-type one-dimensional 1-D position sensitive detector PSD the sensitive area and the position resistance area are combined together,the ohmic contact structure of the device is handicapped,so its accuracy and linearity is affected adversely.The sensitive area and position resistance area in a comb-type 1-D PSD are separated to become the comb teeth and comb ridge area respectively,moreover the position resistance area is made very narrow,even if the doping concentration is rather high,the position resistance can also be made quite large,so that the restriction that is imposed on the contact structure previously can be lifted.The position characteristic curve measured on two different kinds of 1-D PSDs verified authors’ theoretical analysis,and showed that the accuracy and linearity of the comb-type 1-D PSD has been increased markedly;the average position error of the comb-type 1-D PSD is reduced to 26 μm from 55 μm of the strip-type 1-D PSD,and the RMS nonlinearity of the comb-type 1-D PSD is reduced to 0.09 % from 0.94 % of the strip-type 1-D PSD.更多还原