【摘要】 在研制基于微型光机电系统技术的光电器件过程中,需要精确测定器件在给定驱动条件下的运动情况。在对制作完成的光开关进行性能测试时,由于微型光机电系统光开关的几何尺寸的限制,如果要准确测定光开关微反射镜的运动位移,将会有一定的困难。提出了一种采用线阵CCD技术的光学测量方法,实现了对光开关悬臂梁在驱动电压作用下的旋转角度的精确测量。通过理论推导得到了悬臂梁扭转角度与可测量物理量的关系,通过求解方程得到了各个物理量的数值选择对于测量结果的影响,并且给定了测量时各个物理量的参考值。通过实验测量,误差小于10%,表明这是一种具有实际意义的测量方案。更多还原

【Abstract】 The movement status of the deivce needs to be determined accurately under the driven conditions in the design and fabrication of the optoelectronic devices based on the micro-opto-electro-mechanical systems (MOEMS). Because of the limitation of geometrical dimensions, there are some difficulties in accurate measurement on the driven conditions for MOEMS optical switch. This paper presents an optical method for the measurement of the angular rotation of the cantilever beam on the optical switch. Based on the theoretical analysis, the relations of the angular rotation and the measurable parameters are given, and the optimized results of the measurable parameters are performed. The measure error is less 10% and the experimental results obtained demonstrate that the feasibility of the proposed method to be used for evaluating the driven conditions of the MOEMS optical switch.更多还原