【摘要】 证明了枕型二维位置敏感探测器设计的基本原理———Gear定理,并推导了适用于枕型二维位置敏感探测器的位置计算公式,此外还提出了枕型二维位置敏感探测器的制作工艺和测试结果。采用集成电路工艺所研制的枕型二维位置敏感探测器(光敏面为8 mm×8 mm)表现出良好的光电特性,当反偏为5 V时其暗电流约为15 nA,峰值时的光谱灵敏度超过了0.6 A/W。在所测量的 75%光敏区域内,均方根位置误差约为 0.135 mm,而以均方根位置误差表示的非线性度在1.1%左右,比四边形二维位置敏感探测器的位置线性度提高了近一个数量级。更多还原

【Abstract】 The basic design principle of a pin cushion two dimensional position sensitive detector (PSD)——Gear′s theorem is testified, and the position formula of this type of PSD is derived. Moreover, presented in this paper are the fabrication process and device performance of the pin cushion PSD. The pin cushion PSD devices (sensitive area 8 mm×8 mm) fabricated with IC technology show good optoelectronic properties, excellent position linearity and accuracy. The dark current is 15 nA when the reverse bias is 5 V. The peak sensitivity is over 0.6 A/W. Within 75% sensitive area, the measured RMS of position error is about 0.135 mm, and its nonlinearity characterized with RMS of position error is around 1.1%, almost improved by one order of magnitude compared with that of the tetra lateral two dimensional PSD.更多还原