【摘要】 微器件装配技术是实现组合结构的微机械电子学系统(MEMS)的关键技术之一,精密工作台系统则是微装配系统的一个重要组成部分。精密工作台系统包括粗动工作台和微动工作台:粗动工作台包括精密机械及其传动系统、光栅定位系统、直流力矩电机驱动系统及计算机控制系统;微动工作台包括微动台、压电陶瓷驱动电源和电感测微移。实验结果表明,粗动台系统的最高速度为5mm/s,最低速度为3.4μm/s,系统的重复定位精度为±1μm;微动台系统的定位精度可达到±1μm。更多还原

【Abstract】 Micro assembly technology was one of the key techniques in realizing micro electronical machinery system(MEMS). Precision service platform was an important part of the micro assembly system(MAS). The precision service platform system(PSPS) included macro platform and micro platform.Macro platform system included precision mechanics, transmission mechanism, grating positioner, driving system of DC torque motor and feedback control system,and micro platform system included driving power supply, inductance measure instrument and micro platform. Experimental results show that the maximal speed of macro platform is 5mm/s, the minimal speed is 3.4μm/s and the repetitive error is less than 1μm;and the repetitive error of micro platform is less than 0.1μm.更多还原