【摘要】 介绍了一种新型纳米三坐标测量机Z轴的结构设计。提出了两级驱动式结构,即通过粗动与微动相结合的驱动方式实现纳米级精度。第一级粗动,采用2个NANOMOTION LS4系列大行程纳米电机从两侧同时驱动,克服了单侧驱动的不利因素,使得机构运行时更加稳定;第二级微动,采用压电陶瓷驱动,通过柔性铰链位移缩小结构将位移分辨率提高到1 nm。计算和分析表明,这种新型的两级驱动式结构可以满足纳米三坐标测量机Z向测量高精度、大行程要求。更多还原

【Abstract】 A new structural development of Z axis for a nano-CMM is described in this paper.The structure is designed in two-grade actuating style,driven by combination of coarse driving and fine driving to achieve nanometer resolution.Two NANOMOTION LS4 motors working on both sides at the same time in the first grade,can avoid the imbalance of driving at single side.The second grade driven by a PZT actuator achieves nanometer resolution via a contractible flexure hinges structure.Calculation and FEM analysis indicate the structure is adequate to the demand of Z axis,namely high resolution and long range.更多还原