【摘要】 研究了EUV波段CCD相机及其空间分辨率测试。EUV波段相机由荧光屏、MCP像管、光锥和可见光CCD构成,CCD像元大小为14μm,像元数2 048×2 048。在北京同步辐射装置光束线软X射线光学实验束线站3W1B上,利用透射网栅法对相机进行了空间分辨率测试,结果显示这种结构的CCD相机在17.1 nm波长处,空间分辨率达到19μm,相当于极限分辨率为26 lp/mm。更多还原

【Abstract】 A CCD camera in the EUV spectral region is studied.The EUV CCD camera is composed of a fluorescence screen,a MCP intensifier,an optical taper and a visible light CCD chip.The pixel size of CCD is 14 μm,and the pixel number is 2 048×2 048.The spatial resolution with a mesh object experiment is performed in 3W1B beamline of Beijing synchrotron radiation facility.The result shows that the special resolution of 19 μm is achieved in 17.1 nm wavelength,corresponding to limiting resolution of 26 lp/mm.更多还原