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X射线敏感ICCD图像传感器研究
Research on X-ray sensitive ICCD image sensor
【摘要】 为了满足小幅面,高分辨率X射线敏感图像传感器的需求,研制了两种采用ICCD的X射线敏感图像传感器,一种由带光纤面板窗口的CCD、Ⅰ代像增强器、以薄云母为衬底的X射线转换屏构成,工作面积为6.4 mm×4.8 mm;另一种由带光纤锥窗口的CCD、Ⅱ代像增强器、以光纤面板为衬底的X射线转换屏构成,有效工作面积为12.8 mm×9.6 mm。测试结果表明两种传感器的空间分辨率大于5 lp/mm,对线缆的实验结果表明,该图像传感器可以清晰地确定线缆的塑料包层厚度和均匀性。
【Abstract】 To satisfy the need of X-ray sensitive image sensor with small dimension,high resolution,two kinds of X-ray sensitive image sensors which use ICCD as detectors were developed.One was composed of CCD with fiber panel window,Igeneration image intensifier,X-ray transform screen with thin mica substrate,efficient working area of the sensor was 6.4 mm×4.8 mm.The other was composed of CCD with fiber cone window,II-generation image intensifier,X-ray transform screen with fiber panel substrate,its efficient working area was 12.8 mm×9.6 mm.Inspection results show that the resolution of two image sensor is greater than 5 lp/mm and the experiment for measuring cable indicates that these image sensors can be used to measure the thickness and uniformity of cable skin.
【Key words】 image sensor; X-ray image intensifier; ICCD; resolution;
- 【文献出处】 光学精密工程 ,Optics and Precision Engineering , 编辑部邮箱 ,2005年06期
- 【分类号】TP212
- 【被引频次】13
- 【下载频次】224