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TiO2纳米晶的等离子体改性及光电转换性能的研究
Study on the Photoelectrical Property of TiO2 Thin Films by Ar Plasma Treatment
【摘要】 用反应射频溅射法和涂敷法在导电玻璃上制备TiO2薄膜,并用Ar射频等离子体对TiO2薄膜进行处理。按“三明治”结构将TiO2工作电极、Pt/C对电极、0.5MKI+0.05MI2电解液组装成光电池,测量其开路电压和短路电流。结果表明经过Ar射频等离子处理后,溅射法和涂敷法制备的TiO2薄膜组装的光电池的光电流分别提高了约80%和60%。
【Abstract】 Nanocrystal TiO2 films were prepared by reactive RF sputtering and coating method, respectively. The samples were treated by Ar radio frequency plasma. The cells in a “sandwich” structure were assembled with a TiO2 working electrode, Pt/C composite counter electrode and 0.5 M KI + 0.05 M I2 electrolyte. By Ar plasma treatment, the photo-currents of sputtered and coated TiO2 electrodes increased by 80% and 60%, respectively.
【关键词】 等离子体处理;
射频溅射;
光电转换;
纳米晶TiO2;
【Key words】 plasma treatment; radio frequency sputtering; photo-electrical conversion; nanocrystal TiO2 films;
【Key words】 plasma treatment; radio frequency sputtering; photo-electrical conversion; nanocrystal TiO2 films;
【基金】 湖北省自然科学基金(202130626)资助项目
- 【文献出处】 光学与光电技术 ,Optics & Optoelectronic Technology , 编辑部邮箱 ,2005年03期
- 【分类号】TB383
- 【被引频次】4
- 【下载频次】173