【摘要】 采用蒙特卡罗方法,模拟了CH4/H2混合气体为源气体的EACVD中的氢原子发射过程。考虑了电子与H2的弹性碰撞及振动激发、分解、电子激发、相应于Hα,Hβ,Hγ谱线的激发、电离及分解电离等非弹性碰撞过程;与CH4的碰撞考虑了弹性动量传输及振动激发、分解、电子激发、电离及分解电离等非弹性碰撞过程。研究了不同实验条件下产生的H,CH3的数目与Hδ谱线强度的关系,给出了一种通过Hα谱线来推断生长金刚石薄膜的最佳实验条件的方法。更多还原

【Abstract】 The process of atomic hydrogen emission in the CH₄/H₂ gas mixture in EACVD was simulated by Monte Carlo method.In the simulation the collision between electron and H₂ molecule has two basic types: elastic collision and inelastic collision.Four types of inelastic processes have been considered,namely vibrational excitation,dissociation,electron excitations and ionization.For e-CH₄ （collision,） elastic momentum transfer,vibrational excitation,dissociation,ionization,and dissociation ionization were considered.The relationship between the numbers of H,and CH₃,and the atomic hydrogen emission line intensity under different experimental（conditions） was investigated.A method of extrapolating the optimum experimental condition for diamond deposition by the atomic hydrogen emission line is given.The result is of great importance to depositing high quality diamond films by controlling the conditions of technology efficiently.更多还原