节点文献
聚对二甲苯/SiO2复合薄膜的制备及光学性能研究
Study on preparation and optical properties of Poly(p-xylylene)/SiO2 composite film
【摘要】 聚对二甲苯是一种可应用于光学器件和晶体保护的新型高分子材料。采用真空化学气相沉积法制备聚对二甲苯薄膜,并通过提拉镀膜法在其表面镀制一层SiO2增透膜,可提高薄膜的透射率至90%以上。用FT-IR、紫外-近红外分光光度计和XPS对聚对二甲苯/SiO2复合薄膜结构和光学性能进行了表征和测试,并初步研究了薄膜受紫外光辐照而产生光氧化现象的机理。
【Abstract】 Poly(p-xylylene) is a novel material applied in protection of optical components and crystals.Poly(p-xylylene) film was prepared by vacuum Chemical Vapor Deposition process. It is shown that the transmittance of film can be raised to more than 90%by SiO2 anti-reflective coating on its surface.FTIR,UV-visible spectra and XPS were used to characterize the structure and optical property of films. The mechanism of photooxidation of Poly(p-xylylene) film is also prelimiary analyzed .
【关键词】 聚对二甲苯;
SiO2增透膜;
光氧化;
【Key words】 Poly(p-xylylene); SiO2 anti-reflective coating; photooxidation;
【Key words】 Poly(p-xylylene); SiO2 anti-reflective coating; photooxidation;
【基金】 国家自然科学基金重点项目(20133040)资助课题;国家高技术863计划项目(2002AA842052)资助课题
- 【文献出处】 功能材料与器件学报 ,Journal of Functional Materials and Devices , 编辑部邮箱 ,2005年01期
- 【分类号】O484
- 【被引频次】8
- 【下载频次】277