【摘要】 箔式锰铜传感器主要应用于动高压的测试中,现有的箔式锰铜传感器采用有机物作为绝缘层,其测压上限为40GPa。而采用绝缘封装层为Al2O3薄膜的箔式传感器,可拓宽其测压上限。动高压测试结果表明,该传感器所承受的压力为55.32GPa,压阻系数为0.0272,传感器的延续时间可达2.5μm。更多还原

【Abstract】 Foil manganin sensors were used to measure the dynamic high-pressure which were mainly encapsulated in organic material.Aimed at extending the measurement range of manganin gauges,the manganin sensing elements were encapsulated in inorganic material.Al2O3 thin film were deposited on both sides of manganin fiols.Consequently,the measurement range was extended.According to the dynamic high-pressure test,the new kind of sensor measured 55.32GPa high pressure.The sensor records showed its piezoresistance coefficient of 0.0272 and its lifespan of 2.5μm.更多还原