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V₂O₅薄膜在传感器上的研究进展

Recent progress in research on V₂O₅ thin-film sensors

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【Author】 LI Li~1,TONG Mao-song~2,WENG Ai-hua~3(1.School of Chemistry and Chemical Engineering,Daqing Petroleum Institute,Daqing 163318,China;2.R&D Center of Well Logging Company,Daqing Petroleum Administrative Bureau,Daqing 163412,China;3.College of GeoExploration Science and Technology,Jilin University,Jilin 130026,China)

【机构】大庆石油学院化学化工学院；大庆石油管理局测井公司研发中心；吉林大学地球探测科学与技术学院黑龙江大庆163318；黑龙江大庆163412；吉林长春130026；

【摘要】 V2O5薄膜具有优异的物理、化学性质,在化工催化、电子、电化学等许多领域有广泛的应用,由于V2O5薄膜对还原性气体和湿度具有良好的敏感特性,其在气体和湿度传感器上的研究也日渐广泛,因此本文综述了V2O5为基体的薄膜在气体传感器和湿度传感器上的研究进展及存在的问题和解决的思路。更多还原

【Abstract】 Since V₂O₅ thin films have many advanced physical and chemical properties,they have been used wildly in many areas,such as catalyst,electrical technology and electrochemical area.The films also sense to the gas and humidity,and they have obtained much attention in such area.Recent progress of vanadium pentoxide thin films in gas sensor and humidity sensor and their development in advance are described.更多还原