【摘要】 利用磁控溅射方法及微细加工技术制备了弯曲型三明治结构的FeCuNbCrSiB/Cu/FeCuNbCrSiB多层膜,在频率1～40MHz下研究了多层膜的纵向和横向巨磁阻抗效应,结果表明弯曲型三明治结构多层膜的巨磁阻抗效应高于它的传统的多层膜。在频率10MHz、磁场11.94kA/m下巨磁阻抗效应达-50%。更多还原

【Abstract】 Sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB multiplayer films with a meander line structure were prepared on silicon substrate by magnetron sputtering and microfabrication technology. The longitudinal and transverse magneto-impedance (GMI) effects were respectively studied in the frequency range of 1～40MHz. Experimental results show the GMI effect was stronger in the sandwich FeCuNbCrSiB/Cu/FeCuNbCrSiB films with a meander line structure than in its tranditional multiplayer films, and the maximum GMI effect with a value of-50% was obtained at 11.94kA/m for a frequency of 10MHz.更多还原