【摘要】 贵金属具有良好的化学稳定性,高电导率和热导率,特有的电学、磁学、光学等性能,是发展半导体微电子技术必不可少的材料。文章综述了半导体器件欧姆接触、线路和电极、金属化系统、半导体包封,以及化合物半导体、液体金属离子源等用贵金属材料的应用和发展。更多还原

【Abstract】 Precious metals possess excellent chemical stability,high electric and thermal conductivities,and special electric,magnetic and optical properties.They are indispensable materials for the development of semiconductor-microelectronic technology.The present paper summarized the application and development of precious metals for the semiconductor-microelectronic technology with the emphasis on the ohmic contact,the wiring and electrode,the metallization system,and the gold bonding wire of the semiconductor devices,and on the compound semiconductor,and so on.更多还原