【摘要】 为了精确测量激光外差干涉非线性误差,提出了一种新的激光外差干涉非线性误差测量方法。通过对来自激光外差干涉测量臂的输出信号直接进行数据采集和频谱分析,分离出非线性误差的一次谐波和二次谐波分量,得到非线性误差相对测量信号之间的幅度比值;通过建立激光外差干涉非线性误差与幅度比值之间的模型,实现对激光外差干涉非线性误差的精确测量。实验结果表明,应用非线性幅度模型和频谱分析的方法能够精确地测量激光外差干涉非线性误差,相对其它测量方法具有结构简单、易于实现、避免传感器引入非线性误差等优点。更多还原

【Abstract】 To measure the nonlinearity in laser heterodyne interferometer,a novel method to measure the nonlinearity was proposed.By data acquisition and spectral analysis for the output signal from the measurement aim which is moving in a constant speed,the first-harmonic and second-harmonic of nonlinearity are separated and the ratio between the nonlinearities and measurement signal is obtained.With the model of relationship between the ratio of amplitude and the nonlinearities that we proposed,the nonlinearity is measured accurately.The experimental result shows that the method is satisfied for the measurement of nonlinearity in laser heterodyne interferometer and the highlight is that the method can measure the nonlinearity accurately and easily realize.更多还原