【摘要】 详细论述了掠入射非共轴反射成像的KB和KBA显微镜成像系统,根据使用要求设计了由4 个反射镜组成的X射线显微镜。这是一种消像散系统,且使像面倾斜明显降低,在2 mm视场的范围内,分辨率可以达到5~7μm。对研制过程中遇到的难题进行了分析。更多还原

【Abstract】 Non-coaxial grazing reflective imaging KB and KBA microscope systems are discussed,and an X-ray microscope consisting of four mirrors working at grazing incidence is designed.It is an anastigmatic system,and the oblique angle of the image is evidently decreased.The resolution of 5～7 μm can be obtained within 2 mm field of view.And finally the key problems of manufacturing this system are analyzed.更多还原